Piezoactuators related work

@article{NagelWS_2022_Tmech,

title = {Low-Coupling Hybrid Parallel-Serial-Kinematic Nanopositioner with Nonorthogonal Flexure: Nonlinear Design and Control},

author = {W. S. Nagel, S. Andersson, G. Clayton and K. K. Leang},

year  = {2022},

date = {2022-10-01},

urldate = {2021-11-18},

journal = {IEEE/ASME Transactions on Mechatronics},

volume = {27},

issue = {5},

pages = {3683-3693},

abstract = {This article focuses on the design and high-precision control of a new dual-stage, three-axis hybrid parallel-serial-kinematic nanopositioner developed specifically for feature-tracking applications with arbitrary scanning directions. Dual-actuation is achieved by integrating a three-axis shear piezoelectric actuator into the large-range planar stage. A novel nonorthogonal compliant motion-amplifying mechanism which reorients the lateral sample-platform displacement to align with the principal directions of the input piezoactuators is used to minimize parasitic (coupling) motion. A nonlinear rigid-link model and finite element analysis (FEA) are used to optimize over the orientation parameter during the design process. A prototype stage is manufactured and tested, and the lateral and vertical travel ranges are approximately 18 × 21 and 1 μ m, respectively, with secondary lateral actuation in the range of 1 × 1 μ m. Coupling in the long-range stage is below -31 dB for both axes, an estimated 51 to 86% reduction compared to a traditional perpendicular-mechanism design. The measured dominant resonances for the lateral directions of the long-range stage are approximately 1.4 kHz, while short-range positioner resonances are approximately 11 and 40 kHz for the lateral and vertical directions, respectively. The design of a new feedforward-feedback controller is described, and the controller is implemented with field-programmable gate array (FPGA) hardware, where individual actuator contributions are intuitively determined by shaping the frequency response of their relative and summed displacements. An inverse hysteresis operator is used to linearize the plant behavior for effective motion control. Experimental tracking and atomic force microscopy (AFM) imaging results are presented to demonstrate the performance of the new mechanical and control system designs.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{MitrovicA_2019_TmechSpecialIssue,

title = {Closed-loop Range-Based Control of Dual-Stage Nanopositioning Systems},

author = {A. Mitrovic, W. S. Nagel, K. K. Leang and G. M. Clayton },

doi = {10.1109/TMECH.2020.3020047},

year  = {2021},

date = {2021-06-01},

urldate = {2021-06-01},

journal = {IEEE/ASME Transactions on Mechatronics},

volume = {26},

issue = {3},

pages = {1412-1421},

abstract = {In this paper, a closed-loop control framework for dual-stage nanopositioning systems is presented that allows the user to allocate control efforts to the individual actuators based on their range capabilities. Recent work by the authors has focused on range-based control of dual-stage actuators implemented as a prefilter, which assumes that each individual actuator has sensor feedback enabling them to be controlled separately. This paper seeks to address the problem of range-based control of dual-stage systems when sensor measurements are only available from the total output of the system, a commonly encountered design. This is a significant departure from previous work since the range-based filter is included in the dual-stage system feedback loop and stability becomes a concern. In this work, the controller is presented, stability conditions are determined, and imaging experiments are performed on an atomic force microscope (AFM). Tracking results show that the root-mean-square (RMS) tracking error for various triangular reference trajectories is improved with the presented range-based control structure by up to 50% compared to frequency-based methods.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{MitrovicA_2019_Mechatronics,

title = {Analysis and Experimental Comparison of Range-based Control for Dual-Stage Nanopositioners},

author = {A. Mitrovic, K. K. Leang and G. M. Clayton },

doi = {https://doi.org/10.1016/j.mechatronics.2020.102371},

year  = {2020},

date = {2020-04-27},

journal = {Mechatronics, Vol. 69, pp. 102371, 2020},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{GuoD_2020_Tmech,

title = {Spatial-Temporal Trajectory Redesign for Dual-Stage Nanopositioning Systems with Application in AFM},

author = {D. Guo, B. Nagel, G. M. Clayton and K. K. Leang},

doi = {10.1109/TMECH.2020.2971755},

year  = {2020},

date = {2020-02-25},

journal = {IEEE/ASME Trans. on Mechatronics},

volume = {25},

number = {2},

pages = {558 - 569},

abstract = {This article focuses on trajectory redesign for dual-stage nanopositioning systems, where speed, range, and resolution are considered. Dual-stage nanopositioning systems are becoming increasingly popular due to their unique ability to achieve long-range and high-speed operation. Conventional trajectory assignment methods for dual-stage systems commonly consider frequency characteristics of the actuators, a process that can inappropriately allocate short-range, low-frequency components of a reference signal. A new systematic range-and-temporal-based trajectory-redesign process is presented, where the desired trajectory is first split based on achievable positioning bandwidth, and then, split spatially based on the achievable range and positioning resolution. Inversion-based feedforward control techniques are then used to compensate for the dynamic and hysteretic behaviors of a piezo-based prototype dual-stage positioner; this control architecture is selected to emphasize improvements achieved through the new trajectory-redesign method, as well as allow for implementation onto platforms with minimal sensing capabilities. Simulations and atomic force microscope experiments are included to demonstrate the success of this redesign procedure compared to approaches that consider frequency or range alone.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{AdibnazariI_2018_IJIRA,

title = {A 3D-Printed 3-DOF Tripedal Microrobotic Platform for Unconstrained and Omnidirectional Sample Positioning},

author = {I. Adibnazari, W. S. Nagel and K. K. Leang},

year  = {2018},

date = {2018-11-06},

journal = {International Journal of Intelligent Robotics and Applications},

volume = {2},

number = {4},

pages = {425-435},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{FlemingAJ_2015a,

title = {Low-order damping and tracking control for scanning probe systems},

author = {A. J. Fleming, Y. R. Teo and K. K. Leang},

url = {http://www.kam.k.leang.com/academics/pubs/FlemingAJ_2015a.pdf},

doi = {10.3389/fmech.2015.00014},

year  = {2015},

date = {2015-10-24},

journal = {Mechatronics, Frontiers in Mechanical Engineering},

volume = {1},

pages = {Article 14},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{EielsenAA_2015,

title = {Low-order Continuous-time Robust Repetitive Control: Application in Nanopositioning},

author = { A. A. Eielsen and J. T. Gravdahla and K. K. Leang},

year  = {2015},

date = {2015-09-01},

journal = {Mechatronics},

volume = {30},

pages = {231–243},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ClaytonGC_2014a,

title = {Range-based control of dual-stage nanopositioning systems},

author = { G. C. Clayton and C. J. Dudley and K. K. Leang},

url = {http://kam.k.leang.com/academics/pubs/ClaytonGM_2014a.pdf},

year  = {2014},

date = {2014-04-01},

journal = {Review of Scientific Instruments},

volume = {85},

number = {4},

pages = {045003 (6 pages)},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ShanY_2013a,

title = {Mechanical design and control for high-speed nanopositioning: serial-kinematic nanopositioners and repetitive control for nanofabrication},

author = { Y. Shan and K. K. Leang},

url = {http://kam.k.leang.com/academics/pubs/ShanY_2013a.pdf},

year  = {2013},

date = {2013-01-01},

journal = {IEEE Control Systems Magazine (In press), Special Issue on Dynamics and Control of Micro and Naoscale Systems},

volume = {33},

number = {6},

pages = {86 -- 105},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ShanY_2012b,

title = {Accounting for hysteresis in repetitive control design: nanopositioning example},

author = { Y. Shan and K. K. Leang},

url = {http://kam.k.leang.com/academics/pubs/ShanY_2012b.pdf},

year  = {2012},

date = {2012-01-01},

journal = {Automatica},

volume = {48},

number = {8},

pages = {1751 -- 1758},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{LeangKK_2012a,

title = {An experiment for teaching students about control at the nanoscale},

author = { K. K. Leang},

year  = {2012},

date = {2012-01-01},

journal = {IEEE Cont. Syst. Mag.},

volume = {32},

number = {1},

pages = {66--68},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{KentonBJ_2012,

title = {Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner},

author = { B. J. Kenton and K. K. Leang},

url = {http://kam.k.leang.com/academics/pubs/KentonBJ_2012a.pdf},

year  = {2012},

date = {2012-01-01},

journal = {IEEE/ASME Trans. Mechatronics},

volume = {17},

number = {2},

pages = {356 -- 369},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ShanY_2012a,

title = {Dual-stage repetitive control with Prandtl-Ishlinskii hysteresis inversion for piezo-based nanopositioning},

author = { Y. Shan and K. K. Leang},

url = {http://kam.k.leang.com/academics/pubs/ShanY_2012a.pdf},

year  = {2012},

date = {2012-01-01},

journal = {Mechatronics},

volume = {22},

pages = {271 -- 281},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{YongY_2012,

title = {Invited Review: High-speed flexure-guided nanopositioning: mechanical design and control Issues},

author = { Y. Yong and S. O. R. Moheimani and B. J. Kenton and K. K. Leang},

url = {http://www.kam.k.leang.com/academics/pubs/YongYK_2012.pdf},

year  = {2012},

date = {2012-01-01},

journal = {Review of Scientific Instruments},

volume = {83},

number = {12},

pages = {121101},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{KentonBJ_2011b,

title = {A compact ultra-fast vertical nanopositioner for improving SPM scan speed},

author = { B. J. Kenton and A. J. Fleming and K. K. Leang},

year  = {2011},

date = {2011-01-01},

journal = {Rev. Sci. Instr.},

volume = {82},

pages = {123703},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ManeP_2011,

title = {Cyclic Energy harvesting from pyroelectric materials},

author = { P. Mane and J. Xie and K. Mossi and K. K. Leang},

year  = {2011},

date = {2011-01-01},

journal = {IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control},

volume = {58},

number = {1},

pages = {10--17},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{XieJ_2010,

title = {Performance of thin piezoelectric materials for pyroelectric energy harvesting},

author = { J. Xie and X. P. Mane and C. W. Green and K. M. Mossi and K. K. Leang},

year  = {2010},

date = {2010-01-01},

journal = {Journal of Intelligent Material Systems and Structures, Special issue of a selection of papers from the first ASME Smart Materials, Adaptive Structures and Intelligent Systems (SMASIS 2008) Symposium },

volume = {21},

pages = {243 -- 249},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{FlemingAJ_2010b,

title = {Integrated strain and force feedback for high performance control of piezoelectric actuators},

author = { A. J. Fleming and K. K. Leang},

year  = {2010},

date = {2010-01-01},

journal = {Sensors and Actuators: A. Physical},

volume = {161},

number = {1-2},

pages = {256 -- 265},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{LeangKK_2010,

title = {Teaching modules on modeling and control of piezoactuators for undergraduate dynamics and control and mechatronics courses},

author = { K. K. Leang and Q. Zou and G. Pannozzo},

year  = {2010},

date = {2010-01-01},

journal = {IEEE Trans. Education},

volume = {53},

number = {3},

pages = {372 -- 383},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ClaytonGM_2009,

title = {A review of feedforward control approaches in nanopositioning for high speed SPM},

author = { G. M. Clayton and S. Tien and K. K. Leang and Q. Zou and S. Devasia},

year  = {2009},

date = {2009-01-01},

journal = {ASME J. Dyn. Syst. Meas. and Cont.},

volume = {131},

number = {6},

pages = {061101 (19 pages)},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{AridoganU_2009,

title = {Design and analysis of discrete-time repetitive control for scanning probe microscopes},

author = { U. Aridogan and Y. Shan and K. K. Leang},

url = {http://www.kam.k.leang.com/academics/pubs/AridoganU_2009.pdf},

year  = {2009},

date = {2009-01-01},

journal = {ASME J. Dyn. Syst. Meas. and Cont.},

volume = {131},

pages = {061103 (12 pages)},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{LeangKK_2009b,

title = {Feedforward control of piezoactuators in atomic force microscope systems: inversion-based compensation for dynamics and hysteresis},

author = { K. K. Leang and Q. Zou and S. Devasia},

year  = {2009},

date = {2009-01-01},

journal = {IEEE Cont. Syst. Mag., Special Issue on Hysteresis},

volume = {29},

number = {1},

pages = {70 -- 82},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{LeangKK_2009d,

title = {High-speed serial-kinematic AFM scanner: design and drive considerations},

author = { K. K. Leang and A. J. Fleming},

year  = {2009},

date = {2009-01-01},

journal = {Asian Journal of Control, Special issue on Advanced Control Methods for Scanning Probe Microscopy Research and Techniques},

volume = {11},

number = {2},

pages = {144 -- 153},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{FlemingAJ_2008b,

title = {Charge drives for scanning probe microscope positioning stages},

author = { A. J. Fleming and K. K. Leang},

year  = {2008},

date = {2008-01-01},

journal = {Ultramicroscopy},

volume = {108},

pages = {1551--1557},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{IamratanakulD_2008,

title = {Optimal seek-trajectory design for dual-stage systems},

author = { D. Iamratanakul and B. Jordan and K. K. Leang and S. Devasia},

year  = {2008},

date = {2008-01-01},

journal = {IEEE Trans. Cont. Sys. Tech.},

volume = {16},

number = {5},

pages = {869 -- 881},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ShanY_2008b,

title = {Low-cost noncontact infrared sensors for sub-micro-level position measurement and control},

author = { Y. Shan and J. E. Speich and K. K. Leang},

year  = {2008},

date = {2008-01-01},

journal = {IEEE/ASME Trans. on Mechatronics},

volume = {13},

number = {6},

pages = {700 -- 709},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{LeangKK_2007,

title = {Feedback-linearized inverse feedforward for creep, hysteresis, and vibration compensation in AFM piezoactuators},

author = {K. K. Leang and S. Devasia},

url = {http://www.kam.k.leang.com/academics/pubs/LeangKK_2007.pdf},

year  = {2007},

date = {2007-01-01},

journal = {IEEE Trans. Cont. Syst. Tech.},

volume = {15},

number = {5},

pages = {927 -- 935},

abstract = {In this brief, we study the design of a feedback and feedforward controller to compensate for creep, hysteresis, and vibration effects in an experimental piezoactuator system. First, we linearize the nonlinear dynamics of the piezoactuator by accounting for the hysteresis (as well as creep) using high-gain feedback control. Next, we model the linear vibrational dynamics and then invert the model to find a feedforward input to account vibration -- this process is significantly easier than considering the complete nonlinear dynamics (which combines hysteresis and vibration effects). Afterwards, the feedforward input is augmented to the feedback-linearized system to achieve high-precision high-speed positioning. We apply the method to a piezoscanner used in an experimental atomic force microscope to demonstrate the method’s effectiveness and we show significant reduction of both the maximum and root-mean-square tracking error. For example, high-gain feedback control compensates for hysteresis and creep effects, and in our case, it reduces the maximum error (compared to the uncompensated case) by over 90%. Then, at relatively high scan rates, the performance of the feedback controlled system can be improved by over 75% (i.e., reduction of maximum error) when the inversion-based feedforward input is integrated with the high-gain feedback controlled system.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{LeangKK_2006,

title = {Design of hysteresis-compensating iterative learning control for piezo positioners: application to atomic force microscopes},

author = { K. K. Leang and S. Devasia},

year  = {2006},

date = {2006-01-01},

journal = {Mechatronics},

volume = {16},

number = {3--4},

pages = {141 -- 158},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ZouQ_2004,

title = {Control issues in high-speed AFM for biological applications: collagen imaging example},

author = { Q. Zou and K. K. Leang and E. Sadoun and M. J. Reed and S. Devasia},

year  = {2004},

date = {2004-01-01},

journal = {Asian Journal of Control, Special issue on Advances in Nanotechnology Control},

volume = {6},

number = {2},

pages = {164-178},

keywords = {},

pubstate = {published},

tppubtype = {article}

}