Scanning probe microscopy (SPM) related work

@article{MitrovicA_2019_TmechSpecialIssue,

title = {Closed-loop Range-Based Control of Dual-Stage Nanopositioning Systems},

author = {A. Mitrovic, W. S. Nagel, K. K. Leang and G. M. Clayton },

doi = {10.1109/TMECH.2020.3020047},

year  = {2021},

date = {2021-06-01},

urldate = {2021-06-01},

journal = {IEEE/ASME Transactions on Mechatronics},

volume = {26},

issue = {3},

pages = {1412-1421},

abstract = {In this paper, a closed-loop control framework for dual-stage nanopositioning systems is presented that allows the user to allocate control efforts to the individual actuators based on their range capabilities. Recent work by the authors has focused on range-based control of dual-stage actuators implemented as a prefilter, which assumes that each individual actuator has sensor feedback enabling them to be controlled separately. This paper seeks to address the problem of range-based control of dual-stage systems when sensor measurements are only available from the total output of the system, a commonly encountered design. This is a significant departure from previous work since the range-based filter is included in the dual-stage system feedback loop and stability becomes a concern. In this work, the controller is presented, stability conditions are determined, and imaging experiments are performed on an atomic force microscope (AFM). Tracking results show that the root-mean-square (RMS) tracking error for various triangular reference trajectories is improved with the presented range-based control structure by up to 50% compared to frequency-based methods.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{MitrovicA_2019_Mechatronics,

title = {Analysis and Experimental Comparison of Range-based Control for Dual-Stage Nanopositioners},

author = {A. Mitrovic, K. K. Leang and G. M. Clayton },

doi = {https://doi.org/10.1016/j.mechatronics.2020.102371},

year  = {2020},

date = {2020-04-27},

journal = {Mechatronics, Vol. 69, pp. 102371, 2020},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{SahuB_2015,

title = {Design and Analysis of Scanning Probe Microscopy Cantilevers with Microthermal Actuation},

author = { B. Sahu and R. Riddle and D. Ross and M. Sheplak and K. K. Leang and C. R. Taylor},

year  = {2015},

date = {2015-12-01},

journal = {IEEE Journal of Microelectromechanical Systems},

volume = {24},

number = {6},

pages = {1768 - 1781},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{FlemingAJ_2015a,

title = {Low-order damping and tracking control for scanning probe systems},

author = {A. J. Fleming, Y. R. Teo and K. K. Leang},

url = {http://www.kam.k.leang.com/academics/pubs/FlemingAJ_2015a.pdf},

doi = {10.3389/fmech.2015.00014},

year  = {2015},

date = {2015-10-24},

journal = {Mechatronics, Frontiers in Mechanical Engineering},

volume = {1},

pages = {Article 14},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{EielsenAA_2015,

title = {Low-order Continuous-time Robust Repetitive Control: Application in Nanopositioning},

author = { A. A. Eielsen and J. T. Gravdahla and K. K. Leang},

year  = {2015},

date = {2015-09-01},

journal = {Mechatronics},

volume = {30},

pages = {231–243},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ClaytonGC_2014a,

title = {Range-based control of dual-stage nanopositioning systems},

author = { G. C. Clayton and C. J. Dudley and K. K. Leang},

url = {http://kam.k.leang.com/academics/pubs/ClaytonGM_2014a.pdf},

year  = {2014},

date = {2014-04-01},

journal = {Review of Scientific Instruments},

volume = {85},

number = {4},

pages = {045003 (6 pages)},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ShanY_2013a,

title = {Mechanical design and control for high-speed nanopositioning: serial-kinematic nanopositioners and repetitive control for nanofabrication},

author = { Y. Shan and K. K. Leang},

url = {http://kam.k.leang.com/academics/pubs/ShanY_2013a.pdf},

year  = {2013},

date = {2013-01-01},

journal = {IEEE Control Systems Magazine (In press), Special Issue on Dynamics and Control of Micro and Naoscale Systems},

volume = {33},

number = {6},

pages = {86 -- 105},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{YongY_2012,

title = {Invited Review: High-speed flexure-guided nanopositioning: mechanical design and control Issues},

author = { Y. Yong and S. O. R. Moheimani and B. J. Kenton and K. K. Leang},

url = {http://www.kam.k.leang.com/academics/pubs/YongYK_2012.pdf},

year  = {2012},

date = {2012-01-01},

journal = {Review of Scientific Instruments},

volume = {83},

number = {12},

pages = {121101},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ShanY_2012a,

title = {Dual-stage repetitive control with Prandtl-Ishlinskii hysteresis inversion for piezo-based nanopositioning},

author = { Y. Shan and K. K. Leang},

url = {http://kam.k.leang.com/academics/pubs/ShanY_2012a.pdf},

year  = {2012},

date = {2012-01-01},

journal = {Mechatronics},

volume = {22},

pages = {271 -- 281},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{KentonBJ_2012,

title = {Design and control of a three-axis serial-kinematic high-bandwidth nanopositioner},

author = { B. J. Kenton and K. K. Leang},

url = {http://kam.k.leang.com/academics/pubs/KentonBJ_2012a.pdf},

year  = {2012},

date = {2012-01-01},

journal = {IEEE/ASME Trans. Mechatronics},

volume = {17},

number = {2},

pages = {356 -- 369},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{KentonBJ_2011b,

title = {A compact ultra-fast vertical nanopositioner for improving SPM scan speed},

author = { B. J. Kenton and A. J. Fleming and K. K. Leang},

year  = {2011},

date = {2011-01-01},

journal = {Rev. Sci. Instr.},

volume = {82},

pages = {123703},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{FlemingAJ_2010e,

title = {Bridging the gap between conventional and video-speed scanning probe microscopes},

author = { A. J. Fleming and B. J. Kenton and K. K. Leang},

year  = {2010},

date = {2010-01-01},

journal = {Ultramicroscopy},

volume = {110},

number = {9},

pages = {1205 -- 1214},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{SahuB_2010,

title = {Emerging challenges of microactuators for nanoscale positioning, assembly, and manipulation},

author = { B. Sahu and C. R. Taylor and K. K. Leang},

year  = {2010},

date = {2010-01-01},

journal = {ASME Journal of Manufacturing Science and Engineering, Special Issue on Nanomanufacturing},

volume = {132},

number = {3},

pages = {030917 (16 pages)},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ClaytonGM_2009,

title = {A review of feedforward control approaches in nanopositioning for high speed SPM},

author = { G. M. Clayton and S. Tien and K. K. Leang and Q. Zou and S. Devasia},

year  = {2009},

date = {2009-01-01},

journal = {ASME J. Dyn. Syst. Meas. and Cont.},

volume = {131},

number = {6},

pages = {061101 (19 pages)},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{AridoganU_2009,

title = {Design and analysis of discrete-time repetitive control for scanning probe microscopes},

author = { U. Aridogan and Y. Shan and K. K. Leang},

url = {http://www.kam.k.leang.com/academics/pubs/AridoganU_2009.pdf},

year  = {2009},

date = {2009-01-01},

journal = {ASME J. Dyn. Syst. Meas. and Cont.},

volume = {131},

pages = {061103 (12 pages)},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{LeangKK_2009b,

title = {Feedforward control of piezoactuators in atomic force microscope systems: inversion-based compensation for dynamics and hysteresis},

author = { K. K. Leang and Q. Zou and S. Devasia},

year  = {2009},

date = {2009-01-01},

journal = {IEEE Cont. Syst. Mag., Special Issue on Hysteresis},

volume = {29},

number = {1},

pages = {70 -- 82},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{LeangKK_2009d,

title = {High-speed serial-kinematic AFM scanner: design and drive considerations},

author = { K. K. Leang and A. J. Fleming},

year  = {2009},

date = {2009-01-01},

journal = {Asian Journal of Control, Special issue on Advanced Control Methods for Scanning Probe Microscopy Research and Techniques},

volume = {11},

number = {2},

pages = {144 -- 153},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{FlemingAJ_2008b,

title = {Charge drives for scanning probe microscope positioning stages},

author = { A. J. Fleming and K. K. Leang},

year  = {2008},

date = {2008-01-01},

journal = {Ultramicroscopy},

volume = {108},

pages = {1551--1557},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{LeangKK_2007,

title = {Feedback-linearized inverse feedforward for creep, hysteresis, and vibration compensation in AFM piezoactuators},

author = {K. K. Leang and S. Devasia},

url = {http://www.kam.k.leang.com/academics/pubs/LeangKK_2007.pdf},

year  = {2007},

date = {2007-01-01},

journal = {IEEE Trans. Cont. Syst. Tech.},

volume = {15},

number = {5},

pages = {927 -- 935},

abstract = {In this brief, we study the design of a feedback and feedforward controller to compensate for creep, hysteresis, and vibration effects in an experimental piezoactuator system. First, we linearize the nonlinear dynamics of the piezoactuator by accounting for the hysteresis (as well as creep) using high-gain feedback control. Next, we model the linear vibrational dynamics and then invert the model to find a feedforward input to account vibration -- this process is significantly easier than considering the complete nonlinear dynamics (which combines hysteresis and vibration effects). Afterwards, the feedforward input is augmented to the feedback-linearized system to achieve high-precision high-speed positioning. We apply the method to a piezoscanner used in an experimental atomic force microscope to demonstrate the method’s effectiveness and we show significant reduction of both the maximum and root-mean-square tracking error. For example, high-gain feedback control compensates for hysteresis and creep effects, and in our case, it reduces the maximum error (compared to the uncompensated case) by over 90%. Then, at relatively high scan rates, the performance of the feedback controlled system can be improved by over 75% (i.e., reduction of maximum error) when the inversion-based feedforward input is integrated with the high-gain feedback controlled system.},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{LeangKK_2006,

title = {Design of hysteresis-compensating iterative learning control for piezo positioners: application to atomic force microscopes},

author = { K. K. Leang and S. Devasia},

year  = {2006},

date = {2006-01-01},

journal = {Mechatronics},

volume = {16},

number = {3--4},

pages = {141 -- 158},

keywords = {},

pubstate = {published},

tppubtype = {article}

}

@article{ZouQ_2004,

title = {Control issues in high-speed AFM for biological applications: collagen imaging example},

author = { Q. Zou and K. K. Leang and E. Sadoun and M. J. Reed and S. Devasia},

year  = {2004},

date = {2004-01-01},

journal = {Asian Journal of Control, Special issue on Advances in Nanotechnology Control},

volume = {6},

number = {2},

pages = {164-178},

keywords = {},

pubstate = {published},

tppubtype = {article}

}